Eye-type scanning mirror with dual vertical combs for laser display

Young-Chul Ko; Jin-Woo Cho; Yong-Kweun Mun; Hyun-Gu Jeong; Won-Kyoung Choi; Ju-Hyun Lee; Jeong-Woo Kim; Ji-Beom Yoo; Jin-Ho Lee

doi:10.1117/12.591276

22 January 2005 Eye-type scanning mirror with dual vertical combs for laser display

Young-Chul Ko, Jin-Woo Cho, Yong-Kweun Mun, Hyun-Gu Jeong, Won-Kyoung Choi, Ju-Hyun Lee, Jeong-Woo Kim, Ji-Beom Yoo, Jin-Ho Lee

Author Affiliations +

Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005) https://doi.org/10.1117/12.591276
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Since lasers have the most saturated colors, laser display can express the natural color excellently. Laser scanning display has merits of simple structure and high optical efficiency. We designed a new scanning mirror which has a circular mirror plate with an elliptical outer frame and is electrostatically driven by vertical combs arranged at the outer frame. This eye-type mirror showed a larger deflection angle compared to the rectangular and the elliptical mirrors. To increase the driving force twice, stationary comb electrodes are arranged at the upper and lower sides of the moving comb fingers, together. The diameter of the mirror plate is 1.0 mm, and the lengths of the major and minor axes of the outer frame are 2.5 mm and 1.0 mm, respectively. Using this scanning mirror, we obtained an optical scanning angle of 32 degrees when driven by the ac control voltage of the resonant frequency in the range of 22.1 ~ 24.5 kHz with the 100 V dc bias voltages. We demonstrated the full color XGA-resolution video image with the size over 30 inches using an eye-type scanning mirror. The successful development of compact laser TV will open a new area of home application of the laser light.

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Young-Chul Ko, Jin-Woo Cho, Yong-Kweun Mun, Hyun-Gu Jeong, Won-Kyoung Choi, Ju-Hyun Lee, Jeong-Woo Kim, Ji-Beom Yoo, and Jin-Ho Lee "Eye-type scanning mirror with dual vertical combs for laser display", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); https://doi.org/10.1117/12.591276

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