On-chip silicon-based waveguide with light guiding in low-index core materials

Yasha Yi; Peter Bermel; Shoji Akiyama; Xiaoman Duan; Lionel C. Kimerling

doi:10.1117/12.589911

7 March 2005 On-chip silicon-based waveguide with light guiding in low-index core materials

Yasha Yi, Peter Bermel, Shoji Akiyama, Xiaoman Duan, Lionel C. Kimerling

Proceedings Volume 5730, Optoelectronic Integration on Silicon II; (2005) https://doi.org/10.1117/12.589911
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

A new on-chip silicon-based Bragg cladding waveguide with full CMOS compatibility is developed. This novel optical waveguide has a low refractive index core (SiO₂) surrounded by a 1D photonic crystal cladding. The cladding consists of several dielectric bilayers, where each bilayer consists of a high index-contrast pair of layers of Si and Si₃N₄. This new waveguide guides light based on omnidirectional reflection, reflecting light at any angle or polarization back into the core. Its fabrication is fully compatible with current microelectronics processes. In principle, a core of any low-index material can be realized with our novel structure, including air. Potential applications include tight turning radii, high power transmission, nonlinear properties engineering and biomaterials sensors on silicon chip.

Citation Download Citation

Yasha Yi, Peter Bermel, Shoji Akiyama, Xiaoman Duan, and Lionel C. Kimerling "On-chip silicon-based waveguide with light guiding in low-index core materials", Proc. SPIE 5730, Optoelectronic Integration on Silicon II, (7 March 2005); https://doi.org/10.1117/12.589911

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