Paper
13 April 2005 High-Q microcavities in 2D photonic crystal slabs studied by FDTD techniques and Pade approximation
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Abstract
A series of microcavities in 2D hexagonal lattice photonic crystal slabs (PCS’s) are studied. A combination of FDTD techniques and Pade approximation with Baker's algorithm is used to accurately determine the resonant frequencies and quality factors of the cavity modes simultaneously. Q factor larger than 106 is obtained for a one missing hole cavity. Another cavity with smaller and simpler design keeps Q factor larger than 105. Microcavities in silicon-on-insulator-type (SOI-type) PCS’s are also studied. Simulations show that Q factors of cavities in SOI-type PCS’s are much smaller than those in the membrane PCS’s. Deep etching of air holes is still required to obtain relatively high Q cavities in SOI-type PCS’s.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min Qiu and Ziyang Zhang "High-Q microcavities in 2D photonic crystal slabs studied by FDTD techniques and Pade approximation", Proc. SPIE 5733, Photonic Crystal Materials and Devices III, (13 April 2005); https://doi.org/10.1117/12.589579
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Cited by 2 scholarly publications.
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KEYWORDS
Photonic crystals

Finite-difference time-domain method

Optical microcavities

Silicon

Silica

Etching

Refractive index

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