Silicon-on-insulator based quasi 3D photonic crystal structures

Marc Zelsmann; Emmanuel Picard; Vincent Calvo; Thomas Charvolin; Emmanuel Hadji; Hubert Moriceau; Michel Heitzmann; M. E. Nier; Christian Seassal; Xavier Letartre

doi:10.1117/12.593868

13 April 2005 Silicon-on-insulator based quasi 3D photonic crystal structures

Marc Zelsmann, Emmanuel Picard, Vincent Calvo, Thomas Charvolin, Emmanuel Hadji, Hubert Moriceau, Michel Heitzmann, M. E. Nier, Christian Seassal, Xavier Letartre

Author Affiliations +

Proceedings Volume 5733, Photonic Crystal Materials and Devices III; (2005) https://doi.org/10.1117/12.593868
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

A new kind of substrate called Silicon-On-Mirror has been fabricated for nanophotonics applications. It is composed of a monocrystalline silicon layer separated from the silicon substrate by a buried distributed Bragg reflector. Photoluminescence of silicon at 80 K is used to investigate two-dimensional (2D) photonic crystal hexagonal microcavities etched in the monocrystalline silicon layer. Two types of substrates are compared: silicon-on-insulator (SOI) substrates and the new substrates where the silicon layer is bonded on a buried distributed Bragg reflector (DBR). Quality factors of the in-plane resonant modes are analyzed both experimentally and theoretically when the substrate structure is changing. It is shown that the underlying DBR can enhance the in-plane quality factors by a factor 2.5 by reducing the losses. The out-of-plane light extraction efficiency of the cavities and of defectless photonic crystals are also discussed.

Citation Download Citation

Marc Zelsmann, Emmanuel Picard, Vincent Calvo, Thomas Charvolin, Emmanuel Hadji, Hubert Moriceau, Michel Heitzmann, M. E. Nier, Christian Seassal, and Xavier Letartre "Silicon-on-insulator based quasi 3D photonic crystal structures", Proc. SPIE 5733, Photonic Crystal Materials and Devices III, (13 April 2005); https://doi.org/10.1117/12.593868

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available