Implementation of KrF 0.29 k1 lithography

Hyeong Soo Kim; Seok Kyun Kim; Young Sik Kim; Sang Man Bae; Dong Heok Park; Young Deuk Kim; Yoon Suk Hyun; Hyoung Reun Kim; Keun Kyu Kong; Min Seok Son; Yong Soon Jung; Bong Ho Choi

doi:10.1117/12.598610

12 May 2005 Implementation of KrF 0.29 k1 lithography

Hyeong Soo Kim, Seok Kyun Kim, Young Sik Kim, Sang Man Bae, Dong Heok Park, Young Deuk Kim, Yoon Suk Hyun, Hyoung Reun Kim, Keun Kyu Kong, Min Seok Son, Yong Soon Jung, Bong Ho Choi

Author Affiliations +

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.598610
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

One of the crucial tasks of semiconductor process is reduction of manufacturing cost by shrinking the design rule with the help of fine patterning technologies. For high density DRAM application, we explored 0.29 k1 lithography with KrF 0.80NA scanner. Well-known lithography technologies such as asymmetric crosspole, dipole illumination and 6% attenuated PSMs were used for this experiment. Illumination source and mask layout optimization were carried out iteratively to meet CD target, and high contrast thin resist was applied to improve pattern fidelity. Some of the biggest challenges were coping with large MEEF and reducing simulation error. Abnormal non-open fail, probably due to large MEEF, was observed at a dense contact hole pattern. To cope with non-open fail, we tested multi-PSM which composed of alternating PSM along the x-axis direction and 6% attenuated PSM along the y-axis direction. Also we pushed sigma offset of illumination pupil more strongly than exposure tool's specification and there was no serious drawbacks of partial coherency extension. Accurate partial coherence measurement was important for obtaining target CDs and reducing OPC error. For some layers, unexpected simulation error was occurred especially at the patterns of peripheral circuit, therefore we had to calibrate simulation parameters of in-house tool and commercial tool (Solid-C) for OPC simulation. Finally we successfully demonstrated 0.29k1 KrF lithography by showing process yield over 58% in 512Mb DRAM having design rule of 90nm. Based on the results we obtained, we can conclude that 0.29k1 lithography is quite feasible for mass production and 60nm design rule DRAM devices can be manufactured with ArF dry 0.93NA. Since dry 0.93NA corresponds to 1.33NA in ArF water immersion with respect to k1, we can expect that it is possible to fabricate 42nm DRAM devices with ArF immersion lithography.

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Hyeong Soo Kim, Seok Kyun Kim, Young Sik Kim, Sang Man Bae, Dong Heok Park, Young Deuk Kim, Yoon Suk Hyun, Hyoung Reun Kim, Keun Kyu Kong, Min Seok Son, Yong Soon Jung, and Bong Ho Choi "Implementation of KrF 0.29 k1 lithography", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.598610

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