Resolution enhancement in optical lithography using polarized film mask

Guobin Yu; Wumei Lin; Xianzhong Chen; Tingwen Xing; HanMin Yao

doi:10.1117/12.607807

8 December 2004 Resolution enhancement in optical lithography using polarized film mask

Guobin Yu, Wumei Lin, Xianzhong Chen, Tingwen Xing, HanMin Yao

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607807
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

The influence of polarization on the image performance of optical lithography systems has been systematically investigated through comparing the image contrast and the process window with TE-polarization, TM-polarization and un-polarized light, respectively. The simulation results show that the TE-polarization imaging is possible to improve the image performance of optical lithography systems, especially for those systems with high numerical aperture. The effects of polarized-light imaging with a conventional masks and a polarized film mask were studied by carrying out series of experiments under the conditions: 436nm exposure wavelength, numerical aperture of 0.5 and partial-coherence factor of 0.2. It is found that the image quality of the L&S patterns with the polarized film mask is better than that of with the conventional mask and, 0.3 μm L&S patterns are obtained with the polarized film mask.

Citation Download Citation

Guobin Yu, Wumei Lin, Xianzhong Chen, Tingwen Xing, and HanMin Yao "Resolution enhancement in optical lithography using polarized film mask", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607807

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available