A compact shearing interferometer for testing optical systems

Jiri Novak; Pavel Novak; Antonin Miks

doi:10.1117/12.612014

13 June 2005 A compact shearing interferometer for testing optical systems

Jiri Novak, Pavel Novak, Antonin Miks

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612014
Event: Optical Metrology, 2005, Munich, Germany

Abstract

An experimental technique for testing the image quality of microscope objective lenses and optical systems is described. Our work deals with a theoretical analysis of properties of a small and compact shearing interferometer, which was designed, manufactured and tested on several microscope objectives. The designed shearing interferometer can be used for testing the quality of optical systems, e.g. microscope objective lenses and camera lenses. The proposed shearing interferometer enables to determine the residual wave aberration of the tested optical system (e.g. microscope objective lens). The wave-front deformation can be analysed using colorimetric methods or standard phase evaluation techniques for interferometry. The device is characterized by very small dimensions, which provide its easy portability. The described compact shearing interferometer is practically insensitive to vibrations and the mechanical design is also very simple. The proposed evaluation method offers very accurate results and it is suitable for practical utilization in optical industry. The interferometer is suitable for testing laboratories and service engineers in the field of optical microscopy. The asame inferometer can also be used not only for wave abberation measurement, but also for measurement of the modulation transfer (MTF) of tested optical systems.

Citation Download Citation

Jiri Novak, Pavel Novak, and Antonin Miks "A compact shearing interferometer for testing optical systems", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612014

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