Evaluation of spectral modulated interferograms by the extended Kalman filtering method

Igor Gurov; Petr Hlubina; Mikhail Taratin; Alexey Zakharov

doi:10.1117/12.612713

13 June 2005 Evaluation of spectral modulated interferograms by the extended Kalman filtering method

Igor Gurov, Petr Hlubina, Mikhail Taratin, Alexey Zakharov

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612713
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Spectral modulated interferograms (channeled spectra) characterize dispersion of optical samples and allow measuring distances and displacements. Useful information is contained in spectral fringe frequency and phase that can be evaluated dynamically by the extended Kalman filtering method based on recurrence prediction-correction processing procedure. The method provides direct dynamic estimates of unwrapped fringe phase within single fringe sample series. The accuracy of the extended Kalman filtering method has been investigated experimentally by processing recorded spectral interferograms.

Citation Download Citation

Igor Gurov, Petr Hlubina, Mikhail Taratin, and Alexey Zakharov "Evaluation of spectral modulated interferograms by the extended Kalman filtering method", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612713

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