Time synchronization of oscillating objects with laser pulse in pulse interferometry

Jaroslaw Bartold; Jacek Kacperski; Leszek Salbut

doi:10.1117/12.612581

13 June 2005 Time synchronization of oscillating objects with laser pulse in pulse interferometry

Jaroslaw Bartold, Jacek Kacperski, Leszek Salbut

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612581
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Significant progress in MEMS/MOEMS development requires new measurement methods. The pulse interferometry is one of the widely used technique for oscillating object analyses. It is based on object observation during the short laser pulse illumination. In the paper a new method for electronic time synchronization of oscillating objects, laser pulses and camera registration is proposed. The system is developed to measure the silicon micromembrane surface shape. Laser pulse mode properties and camera adaptation to a microinterferometer setup are considered in the paper. A complementary system oriented on the investigation of the relationship between object transient shape changes and oscillation phases is shown. Preliminary results of measurement of silicon membrane shape changes during oscillations are presented.

Citation Download Citation

Jaroslaw Bartold, Jacek Kacperski, and Leszek Salbut "Time synchronization of oscillating objects with laser pulse in pulse interferometry", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612581

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