Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF)

B. Doerband; J. Hetzler

doi:10.1117/12.614311

30 August 2005 Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF)

B. Doerband, J. Hetzler

Proceedings Volume 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II; 587806 (2005) https://doi.org/10.1117/12.614311
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The lateral resolution of an interferometer is limited mainly by the design of the optical arrangement as well as the size of the beam stop. For its characterization the MTF^1,2 is not very useful. The height of a structure normal to the surface under test is transferred into a phase of a reflected wavefront. Since imaging mechanisms for intensity and phase are very different, we propose a Height Transfer Function (HTF) to describe the lateral resolution of interferometers. The HTF shows the quotient of the reconstructed and the original height of a sine-modulated surface structure as a function of the spatial frequency. The HTF can be measured with a test sample of varying periodical surface profiles and spacings. Simulations can be made using a combination of geometrical ray tracing and Fourier transformation techniques. Two different layouts of null systems for the test of an asphere are compared. A device to measure the HTF is shown along with results for a variety of different interferometers.

Citation Download Citation

B. Doerband and J. Hetzler "Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF)", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587806 (30 August 2005); https://doi.org/10.1117/12.614311

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available