Heterodyne Interferometric Profilometer

G. L. Bourdet; R. A. Muller

doi:10.1117/12.951992

1 May 1986 Heterodyne Interferometric Profilometer

G. L. Bourdet, R. A. Muller

Proceedings Volume 0590, Infrared Technology and Applications; (1986) https://doi.org/10.1117/12.951992
Event: 1985 International Technical Symposium/Europe, 1985, Cannes, France

Abstract

Homodyne interferometry has been largely used for optical surfaces characterization. However, when quantitative data are required, this technique is very time consuming. Direct phase measurement by heterodyne interferometry can provide a fast and accurate means of obtaining surface profiles. In the following paper, we describe such a method making it possible to determine surfaces shapes.

Citation Download Citation

G. L. Bourdet and R. A. Muller "Heterodyne Interferometric Profilometer", Proc. SPIE 0590, Infrared Technology and Applications, (1 May 1986); https://doi.org/10.1117/12.951992

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