Evolving criteria for research facilities: vibration

Hal Amick; Michael Gendreau; Todd Busch; Colin Gordon

doi:10.1117/12.617970

18 August 2005 Evolving criteria for research facilities: vibration

Hal Amick, Michael Gendreau, Todd Busch, Colin Gordon

Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 593303 (2005) https://doi.org/10.1117/12.617970
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the "BBN" criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared with representative types of research equipment and activities.

Citation Download Citation

Hal Amick, Michael Gendreau, Todd Busch, and Colin Gordon "Evolving criteria for research facilities: vibration", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 593303 (18 August 2005); https://doi.org/10.1117/12.617970

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