Critical EMI and RFI challenges in nanotechnology and research facilities

Louis S. Vitale

doi:10.1117/12.618511

29 August 2005 Critical EMI and RFI challenges in nanotechnology and research facilities

Louis S. Vitale

Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 593305 (2005) https://doi.org/10.1117/12.618511
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

High resolution imaging systems (i.e., SEM, TEM, FIB, etc.), diagnostic medical equipment (i.e., EEG, EKG, EMG, MRI, etc.), scientific instruments and computer equipment are all susceptible to various sources of electromagnetic and radiofrequency interference (EMI & RFI). Simply stated, optimal tool performance is the requisite practice in nanotechnology, medical and research environments. Compromised and degraded performance due to elevated ambient EMI/RFI environments that exceed the instrument's susceptibility thresholds is clearly not acceptable. In the United States uniform EMI/RFI susceptibility testing methods and procedures are not mandated by law. Although the FCC, Part 15, regulates RF interference with radio services and electric equipment from intentional and unintentional sources, it does not address susceptibility issues directly. Therefore, confusion abounds as each manufacturer presents their unique method to measure and document the ambient EMI/RFI environment to ensure optimal performance. VitaTech will examine the various frequency bands and waveforms of non-ionizing electromagnetic (EM) spectrum, review basic near and far-field EM theory, identify problematic EMI and RFI sources, and address the units of measurement and susceptibility. Examples of EMI/RFI instrument susceptibility will be presented for analysis with actual EMI/RFI site surveys and power frequency simulations. The paper examines several EMI/RFI industry standards including SEMI E33-94 and European Union EN 61000-6-1 and EN 61000-6-2. Finally, corrective strategies and costs to attenuate and control elevated EMI/RFI environments will be presented such as magnetic and RF shielding systems, active cancellation systems, RGS/EMT conduits for electrical power distribution, self-canceling MI cable systems and other mitigation techniques.

Citation Download Citation

Louis S. Vitale "Critical EMI and RFI challenges in nanotechnology and research facilities", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 593305 (29 August 2005); https://doi.org/10.1117/12.618511

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available