Fabrication of <i>p-n</i> junctions in as-grown ZnMgO/ZnO films

Hyuck Soo Yang; Y. Li; D. P. Norton; S. J. Pearton; Soohwan Jang; F. Ren; L. A. Boatner

doi:10.1117/12.616668

14 September 2005 Fabrication of p-n junctions in as-grown ZnMgO/ZnO films

Hyuck Soo Yang, Y. Li, D. P. Norton, S. J. Pearton, Soohwan Jang, F. Ren, L. A. Boatner

Proceedings Volume 5941, Fifth International Conference on Solid State Lighting; 59411P (2005) https://doi.org/10.1117/12.616668
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We achieved p-(Zn,Mg)O by doping with phosphorous and the conduction type was confirmed by capacitance-voltage properties of metal/insulator/p-(Zn,Mg)O:P diode structures as well as Hall measurements. The p-(Zn,Mg)O:P/n-ZnO junction was grown by pulsed laser deposition on bulk ZnO doped with Sn. Without post-growth annealing, the phosphorous-doped ZnMgO showed p-type conductivity (hole density ~10¹⁶ cm^-3, mobility ~6 cm²V^-1s^-1) in the as-grown state. The metal contacts in top-to-bottom p-n junctions were made with Ni/Au as the p-ohmic and Ti/Au as the backside n-ohmic contact. The p-contacts showed improved characteristics after annealing up to 350 - 400 °C, but the n-contacts were ohmic as-deposited. The simple, low temperature growth (≤500 °C) and processing sequence (≤400 °C) shows the promise of ZnO for applications such as low-cost UV light emitters and transparent electronics.

Citation Download Citation

Hyuck Soo Yang, Y. Li, D. P. Norton, S. J. Pearton, Soohwan Jang, F. Ren, and L. A. Boatner "Fabrication of p-n junctions in as-grown ZnMgO/ZnO films", Proc. SPIE 5941, Fifth International Conference on Solid State Lighting, 59411P (14 September 2005); https://doi.org/10.1117/12.616668

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