Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry

Vlček Jaroslav; Pištora Jaromír; Postava Kamil; Yamaguchi Tomuo; Brings Reiner

doi:10.1117/12.638815

6 December 2006 Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry

Vlček Jaroslav, Pištora Jaromír, Postava Kamil, Yamaguchi Tomuo, Brings Reiner

Proceedings Volume 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 59450A (2006) https://doi.org/10.1117/12.638815
Event: 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2005, Nitra, Slovakia

Abstract

Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data.

Citation Download Citation

Vlček Jaroslav, Pištora Jaromír, Postava Kamil, Yamaguchi Tomuo, and Brings Reiner "Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry", Proc. SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 59450A (6 December 2006); https://doi.org/10.1117/12.638815

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