Deep proton lithography outside the vacuum setup

Rafal Kasztelanic

doi:10.1117/12.623218

6 October 2005 Deep proton lithography outside the vacuum setup

Rafal Kasztelanic

Proceedings Volume 5948, Photonics Applications in Industry and Research IV; 59481F (2005) https://doi.org/10.1117/12.623218
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

There are several technologies for cheap mass fabrication of microelements. When we need elements of high structural depth, one of the most important technologies is the LIGA process. Since this method is time- and cost-consuming, there are a few alternative methods to be used instead of the LIGA. One of them is the use of the ion track lithography, especially deep proton lithography. So far, all the deep lithography setups have operated in vacuum. Accelerated protons were focused or formed by a mask to light a target placed in vacuum. Such an approach limited the size of the target and lengthened the time needed to place a new the target in the setup. It also needed a relatively small steering setup, adapted to operate in vacuum. That is why a novel proton lithography setup operating in the air has been proposed. The setup, whose size is no longer limited, allows for a quick access to the target. However, the parameters of the proton beam moving from vacuum into the air change, which affects the way protons interact with the target. This enforces adding several new elements to the classical proton lithography setup. In spite of that, such a setup is cheaper and easier to use than the classical one, but it allows for obtaining microelements of similar quality.

Citation Download Citation

Rafal Kasztelanic "Deep proton lithography outside the vacuum setup", Proc. SPIE 5948, Photonics Applications in Industry and Research IV, 59481F (6 October 2005); https://doi.org/10.1117/12.623218

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available