Paper
12 October 2005 MEMS based digital transform spectrometers
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Abstract
Earlier this year, a new breed of Spectrometers based on Micro-Electro-Mechanical-System (MEMS) engines has been introduced to the commercial market. The use of these engines combined with transform mathematics, produces powerful spectrometers at unprecedented low cost in various spectral regions.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yariv Geller and Mouli Ramani "MEMS based digital transform spectrometers", Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 597014 (12 October 2005); https://doi.org/10.1117/12.627942
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CITATIONS
Cited by 7 scholarly publications.
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KEYWORDS
Microelectromechanical systems

Spectrometers

Sensors

Stray light

Spectroscopy

Chemical elements

Optical filters

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