Silicon and germanium wafer-based optics for replacing low-to mid-IR aspheric lenses

Robert D Te Kolste; Robert E. Hutchins; Jessica L. Wargats; James T. A. Carriere

doi:10.1117/12.631296

11 October 2005 Silicon and germanium wafer-based optics for replacing low-to mid-IR aspheric lenses

Robert D Te Kolste, Robert E. Hutchins, Jessica L. Wargats, James T. A. Carriere

Proceedings Volume 5987, Electro-Optical and Infrared Systems: Technology and Applications II; 59870H (2005) https://doi.org/10.1117/12.631296
Event: European Symposium on Optics and Photonics for Defence and Security, 2005, Bruges, Belgium

Abstract

In the low-to-mid IR wavelength range there is a need for high performance, cost effective aspheric optics. Silicon has many advantages including high transmission and a high refractive index, but it can be very difficult to diamond turn. The resulting fabrication errors reduce efficiency and increase scattering and stray light. Wafer-based lithographic techniques can be used to make diffractive and refractive elements in both silicon and germanium. Advantages of diffractive structures such as: thinner elements, highly aspheric and even non-rotationally symmetric phase functions and chromatic compensation make this an attractive technology compared to diamond turning. In addition, wafer based fabrication makes these elements cost-effective in many applications. At Digital Optics Corporation, we have designed and fabricated wafer-based optics for use in the 1.3-14 micron range. In this paper, we will discuss the design, fabrication and evaluation of several product categories including a diffractive germanium beamshaper, a diffractive silicon aspheric lens, and a diffractive silicon spiral lens.

Citation Download Citation

Robert D Te Kolste, Robert E. Hutchins, Jessica L. Wargats, and James T. A. Carriere "Silicon and germanium wafer-based optics for replacing low-to mid-IR aspheric lenses", Proc. SPIE 5987, Electro-Optical and Infrared Systems: Technology and Applications II, 59870H (11 October 2005); https://doi.org/10.1117/12.631296

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KEYWORDS

Silicon

Diffractive optical elements

Aspheric lenses

Germanium

Diamond turning

Lithography

Etching

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