Design and fabrication of C/W hard x-ray supermirrors

Zhong Zhang; Zhanshan Wang; Fengli Wang; Wennjuan Wu; Hongchang Wang; Shuji Qin; Lingyan Chen

doi:10.1117/12.668172

1 February 2006 Design and fabrication of C/W hard x-ray supermirrors

Zhong Zhang, Zhanshan Wang, Fengli Wang, Wennjuan Wu, Hongchang Wang, Shuji Qin, Lingyan Chen

Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 60341Y (2006) https://doi.org/10.1117/12.668172
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

We designed two kinds of supermirrors composed of Carbon and Tungsten in current paper. Using Simplex Optimization method, we designed C/W supermirror with broad incident angular range (0.5°~0.9°) at Cu Kα line (λ=0.154nm). Connecting the analytical method, based on oversimplified analytical and semi-empirical formulas, with the Simplex Optimization method, we designed C/W supermirror with broad photon energy range (16~25keV), at θ=0.5°. The negative effect, due to the interfacial roughness and diffusion between the adjacent sublayers in multilayer, also emerges in simulating the practice performance of the both supermirrors. The supermirrors with broad incident angular range were fabricated by DC magnetron sputtering, because such supermirror is easy to be measured at our lab, using X-ray diffractormeter. The measured reflectivity near the first order Bragg peak is about 30% at Cu Kα line. The roughness factor is about 0.84nm by the fitting data.

Citation Download Citation

Zhong Zhang, Zhanshan Wang, Fengli Wang, Wennjuan Wu, Hongchang Wang, Shuji Qin, and Lingyan Chen "Design and fabrication of C/W hard x-ray supermirrors", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 60341Y (1 February 2006); https://doi.org/10.1117/12.668172

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