Deep-UV LEDs: physics, performance, and applications

R. Gaska; J. Zhang

doi:10.1117/12.638266

28 December 2005 Deep-UV LEDs: physics, performance, and applications

R. Gaska, J. Zhang

Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 603706 (2005) https://doi.org/10.1117/12.638266
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

We present a review of our work on the development and applications of AlInGaN-based deep ultraviolet light emitting diodes (LEDs) with peak emission in the spectral range from 247 nm to 365 nm. The devices demonstrate wall-plug efficiency in excess of 2%, modulation frequency in excess of 200 MHz and very low noise performance. Single wavelength device as well as multi-wavelength high power ultraviolet lamps have been developed for applications in sterilization industry, UV-curing, optical sensors, medical, biomedical and spectroscopic instrumentation.

Citation Download Citation

R. Gaska and J. Zhang "Deep-UV LEDs: physics, performance, and applications", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 603706 (28 December 2005); https://doi.org/10.1117/12.638266

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