Optical scanning devices based on PZT thick films formed by aerosol deposition method

Jae-Hyuk Park; Jun Akedo; Maxim Lebedev; Harumichi Sato

doi:10.1117/12.638489

3 January 2006 Optical scanning devices based on PZT thick films formed by aerosol deposition method

Jae-Hyuk Park, Jun Akedo, Maxim Lebedev, Harumichi Sato

Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 60371S (2006) https://doi.org/10.1117/12.638489
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

High-speed metal-based optical microscanning devices with low production cost and simple fabrication process wre successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package. The scanner is applicable to SVGA high-resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.

Citation Download Citation

Jae-Hyuk Park, Jun Akedo, Maxim Lebedev, and Harumichi Sato "Optical scanning devices based on PZT thick films formed by aerosol deposition method", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60371S (3 January 2006); https://doi.org/10.1117/12.638489

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