Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference

Hiroyo Segawa; Hiroaki Misawa; Tetsuji Yano; Shuichi Shibata

doi:10.1117/12.647213

1 March 2006 Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference

Hiroyo Segawa, Hiroaki Misawa, Tetsuji Yano, Shuichi Shibata

Author Affiliations +

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61060N (2006) https://doi.org/10.1117/12.647213
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Multi-beam laser interference (MLI) lithography is known to be one of the fabrication techniques of photonic crystals. In MLI lithography, laser beams are interfered on a scale of the wavelength of light and are irradiated to photosensitive films. We have paid attention to photosensitive TiO2-organic hybrid film, which has high refractive index. TiO2-organic hybrid periodic pillar patterns were fabricated by MLI lithography. The TiO2 hybrid film, which was prepared from Ti-alkoxide and β-diketone by the sol-gel method, was exposed to the interference pattern of femtosecond pulses at 800 nm wavelength. After laser irradiation, the unirradated portion was removed by the development and rinse. Two-dimensional periodic standing alone pillars and 2×2 and 3×3 top-gathering pillars, which were gathered at the top by means of self-organization were formed by changing conditions such as laser irradiation time and film thickness. The pillar patterns depended upon the rinse liquid, the diameter, and the height of pillars. The top-gathering pillars are applicable for diffractive optics.

Citation Download Citation

Hiroyo Segawa, Hiroaki Misawa, Tetsuji Yano, and Shuichi Shibata "Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060N (1 March 2006); https://doi.org/10.1117/12.647213

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available