Polymer photonic integrated circuits by DUV-induced modification

Dominik G. Rabus; Patric Henzi; Mathias Bruendel; Herbert Hein; Yasuhisa Ichihashi; Tilmann Rogge; Alexander Welle

doi:10.1117/12.644079

24 February 2006 Polymer photonic integrated circuits by DUV-induced modification

Dominik G. Rabus, Patric Henzi, Mathias Bruendel, Herbert Hein, Yasuhisa Ichihashi, Tilmann Rogge, Alexander Welle

Proceedings Volume 6123, Integrated Optics: Devices, Materials, and Technologies X; 61230I (2006) https://doi.org/10.1117/12.644079
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

Polymer optical waveguide devices will play a key role in several rapidly developing areas such as optical networks, biophotonic and fluidic applications. We have developed a technology which enables the increase of the refractive index of methylmethacrylate based polymers by deep ultra violet (DUV) radiation. The modification of the dielectric properties of polymers by DUV is a useful technique for the realization of photonic integrated optical circuits. The technique presented here has several advantages with respect to common methods because only a single polymer layer is used, which serves as the substrate and waveguide as well and no further etching or development step is required. This method can not only be applied to planar polymer substrates but also to preembossed substrates. This enables the fabrication of ridge waveguide based devices by hot embossing. Nickel stampers with feature heights of about 15-20 μm and aspect ratios usually between 2:1 and 3:1 can be utilized for replication without major effort. Nickel stampers are not only used to replicate optical waveguides, but are also used to realize fluidic channels in the range of several microns. UV modification of methylmethacrylate polymers additionally leads to a new surface chemistry affecting the selective absorption of proteins and the adhesion of living cells in vitro. The bi-functionality of the modified polymer chips supporting waveguides and cell anchorage capabilities at the same time provides the opportunity to monitor protein adsorption, cell attachment and spreading processes by evanescent-field techniques.

Citation Download Citation

Dominik G. Rabus, Patric Henzi, Mathias Bruendel, Herbert Hein, Yasuhisa Ichihashi, Tilmann Rogge, and Alexander Welle "Polymer photonic integrated circuits by DUV-induced modification", Proc. SPIE 6123, Integrated Optics: Devices, Materials, and Technologies X, 61230I (24 February 2006); https://doi.org/10.1117/12.644079

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