Research of an integrated LiTaO3 pyroelectric infrared fire detector

Zheng Dong; Da-Gui Huang; De-Yin Zhang

doi:10.1117/12.674259

9 June 2006 Research of an integrated LiTaO₃ pyroelectric infrared fire detector

Zheng Dong, Da-Gui Huang, De-Yin Zhang

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61491X (2006) https://doi.org/10.1117/12.674259
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A new integrated LiTaO₃ pyroelectric infrared fire detector and its characteristics are investigated in this paper. A novel multilayer infrared detector structure and its operating principle are presented. The detector is fabricated based on the pyroelectric effect of LiTaO₃ film by the technology of MEMS based on silicon technology. A detector response parameter measurement system is built to measure the infrared response of the fire detector. The voltage response and the specific detectivity of the detector are also studied.

Citation Download Citation

Zheng Dong, Da-Gui Huang, and De-Yin Zhang "Research of an integrated LiTaO₃ pyroelectric infrared fire detector", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491X (9 June 2006); https://doi.org/10.1117/12.674259

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