High-power low cost drive laser for LPP source

Igor V. Fomenkov; Björn A. M. Hansson; Norbert R. Böwering; Alex I. Ershov; William N. Partlo; Vladimir B. Fleurov; Oleh V. Khodykin; Alexander N. Bykanov; Curtis L. Rettig; Jerzy R. Hoffman; Ernesto Vargas L.; Juan A. Chavez; William F. Marx; David C. Brandt

doi:10.1117/12.655733

24 March 2006 High-power low cost drive laser for LPP source

Igor V. Fomenkov, Björn A. M. Hansson, Norbert R. Böwering, Alex I. Ershov, William N. Partlo, Vladimir B. Fleurov, Oleh V. Khodykin, Alexander N. Bykanov, Curtis L. Rettig, Jerzy R. Hoffman, Ernesto Vargas L., Juan A. Chavez, William F. Marx, David C. Brandt

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61513X (2006) https://doi.org/10.1117/12.655733
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

We report on the approach for a high-power high-beam-quality drive laser system that is used for a laser-produced plasma (LPP) EUV source. Cymer has conducted research on a number of solutions for a multi-kW drive laser system that satisfy high volume production requirements. Types of lasers to be presented include XeF at 351 nm and CO₂ at 10.6 micron. We report on a high efficiency XeF amplifier with a 3rd harmonic Nd:YLF master oscillator operated in the 6 to 8 kHz range and a CO₂ laser system with Q-switched cavity dumped master oscillator and RF pumped fast axial flow amplifiers operated in the 10 to 100 kHz range. CO₂ laser short pulse gain and optical isolation techniques are reported. Optical performance data and design features of the drive laser system are discussed, as well as a path to achieve output power scaling to meet high volume manufacturing (HVM) requirements and beyond. Additionally, the electrical efficiency as a component of cost of operation is presented. Development of a drive laser with sufficient output power, high beam quality, and economical cost of operation is critical to the successful implementation of a laser-produced-plasma (LPP) EUV source for HVM applications. Cymer has conducted research on a number of solutions to this critical need. We report our progress on development of a high power system with two gas-discharge power amplifiers to produce high output power with high beam quality. We provide optical performance data and design features of the drive laser as well as a path to output power scaling to meet HVM requirements. Development of a drive laser for LPP EUV source is a challenging task. It requires multi-kW laser output power with short pulse duration and diffraction limited beam quality. In addition, this system needs to be very reliable and cost-efficient to satisfy industry requirements for high volume integrated circuit manufacturing. Feasibility studies of high power laser solutions that utilize proven laser technologies in high power optical gain modules and deliver required beam properties have been performed and are reported.

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Igor V. Fomenkov, Björn A. M. Hansson, Norbert R. Böwering, Alex I. Ershov, William N. Partlo, Vladimir B. Fleurov, Oleh V. Khodykin, Alexander N. Bykanov, Curtis L. Rettig, Jerzy R. Hoffman, Ernesto Vargas L., Juan A. Chavez, William F. Marx, and David C. Brandt "High-power low cost drive laser for LPP source", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61513X (24 March 2006); https://doi.org/10.1117/12.655733

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