Defining the role of SEM metrology for advanced process control

A. Nikitin; A. Sicignano; D. Yeremin; M. Sandy; T. Goldburt

doi:10.1117/12.656701

24 March 2006 Defining the role of SEM metrology for advanced process control

A. Nikitin, A. Sicignano, D. Yeremin, M. Sandy, T. Goldburt

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 61523I (2006) https://doi.org/10.1117/12.656701
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The problem of enacting an effective Advanced Process Control (APC) system is herein discussed [1]. The schematic structure of the system is represented below: (please see manuscript). The creation of such a system with a communication link between the mask designer and lithography and process engineering of consequent operations can be broken down into two problems: 1. Organization of the interaction of services performed by APC. 2. Reliability of the measurement information obtained in SEM CD metrology. We will focus on the second problem. The effectiveness of the operation of the APC system depends on the reliability (precision and accuracy) of the measurement outcomes.

Citation Download Citation

A. Nikitin, A. Sicignano, D. Yeremin, M. Sandy, and T. Goldburt "Defining the role of SEM metrology for advanced process control", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 61523I (24 March 2006); https://doi.org/10.1117/12.656701

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