Nano-interconnection for microelectronics and polymers with benzo-triazole

Yeonjoon Park; Sang H. Choi; Hyunpil Noh; Young Kuk

doi:10.1117/12.657760

31 March 2006 Nano-interconnection for microelectronics and polymers with benzo-triazole

Yeonjoon Park, Sang H. Choi, Hyunpil Noh, Young Kuk

Proceedings Volume 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; 617214 (2006) https://doi.org/10.1117/12.657760
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

Benzo-Triazole (BTA) is considered as an important bridging material that can connect an organic polymer to the metal electrode on silicon wafers as a part of the microelectronics fabrication technology. We report a detailed process of surface induced 3-D polymerization of BTA on the Cu electrode material which was measured with the Ultraviolet Photoemission Spectroscopy (UPS), X-ray Photoemission Spectroscopy (XPS), and Scanning Tunneling Microscope (STM). The electric utilization of shield and chain polymerization of BTA on Cu surface is contemplated in this study.

Citation Download Citation

Yeonjoon Park, Sang H. Choi, Hyunpil Noh, and Young Kuk "Nano-interconnection for microelectronics and polymers with benzo-triazole", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 617214 (31 March 2006); https://doi.org/10.1117/12.657760

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