Compact and stress-released piston tip-tilt mirror

W. Noell; T. Overstolz; R. Stanley; N. F. de Rooij

doi:10.1117/12.666511

21 April 2006 Compact and stress-released piston tip-tilt mirror

W. Noell, T. Overstolz, R. Stanley, N. F. de Rooij

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860H (2006) https://doi.org/10.1117/12.666511
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 μm @ 80 V with good repeatability, and a tip-tilt of up to 2 mrad @ 50 V.

Citation Download Citation

W. Noell, T. Overstolz, R. Stanley, and N. F. de Rooij "Compact and stress-released piston tip-tilt mirror", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860H (21 April 2006); https://doi.org/10.1117/12.666511

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