High-speed bistable MEMS commutators

E. G. Kostsov; A. A. Kolesnikov

doi:10.1117/12.683498

10 June 2006 High-speed bistable MEMS commutators

E. G. Kostsov, A. A. Kolesnikov

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 62601K (2006) https://doi.org/10.1117/12.683498
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

The possibility of creation of high-speed (microsecond range) microcommutators with the two steady states is discussed. Microcommutators are based on the micromotors with the high energy output, that perfoms the electromechanical energy conversion by the electrostatic rolling of the thin metallic film on the surface of the dielectric with the high value of the dielectric permeability. The analysis of the microrelay operation is perfomed, and their main parameters are given. One microcommutator construction is described, with microcommutator manufactured by micromachining.

Citation Download Citation

E. G. Kostsov and A. A. Kolesnikov "High-speed bistable MEMS commutators", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62601K (10 June 2006); https://doi.org/10.1117/12.683498

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