Nanoprocessing of silicon substrate using surface plasmon polaritons of gold particle and polystyrene particle excited by femtosecond laser

Tomoya Miyanishi; Hiroto Takada; Nikolay N. Nedyalkov; Makoto Hasegawa; Minoru Obara

doi:10.1117/12.674501

7 June 2006 Nanoprocessing of silicon substrate using surface plasmon polaritons of gold particle and polystyrene particle excited by femtosecond laser

Tomoya Miyanishi, Hiroto Takada, Nikolay N. Nedyalkov, Makoto Hasegawa, Minoru Obara

Author Affiliations +

Proceedings Volume 6261, High-Power Laser Ablation VI; 62612S (2006) https://doi.org/10.1117/12.674501
Event: High-Power Laser Ablation 2006, 2006, Taos, NM, United States

Abstract

Nanohole processing of silicon substrate using surface plasmon polaritons of nano gold excited by femtosecond laser is described in comparison with the nanohole processing with transparent polystyrene (PS) nanoparticle template. Gold particles with diameters of 40, 80, or 200 nm are spin coated on the substrate, and a 100 fs, 820 nm laser pulse is used to irradiate the samples. The produced holes are analyzed by scanning electron microscopy and atomic force microscopy. A theoretical analysis of the experimental results is conducted by FDTD (Finite Difference Time Domain) simulation. The dependence of the laser fluence and particle size on the nanohole properties is studied. The nanohole profiles correspond to the field distributions on the Si substrate at low fluence region. A highest electric field enhancement factor of about 26 is obtained for gold particles with a diameter of 200 nm.

Citation Download Citation

Tomoya Miyanishi, Hiroto Takada, Nikolay N. Nedyalkov, Makoto Hasegawa, and Minoru Obara "Nanoprocessing of silicon substrate using surface plasmon polaritons of gold particle and polystyrene particle excited by femtosecond laser", Proc. SPIE 6261, High-Power Laser Ablation VI, 62612S (7 June 2006); https://doi.org/10.1117/12.674501

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available