One particularity of energy-angular secondary electrons spectrum

S. S. Borisov; S. I. Zaitsev

doi:10.1117/12.693210

31 May 2006 One particularity of energy-angular secondary electrons spectrum

S. S. Borisov, S. I. Zaitsev

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780J (2006) https://doi.org/10.1117/12.693210
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

In this work we discuss the problems of the energy-angular spectrum of backscattered and true secondary electrons simulation using the discrete (DLA) and the continuous (CLA) loss approximations. The presence of an angular spectrum artefact - the deviation from the sinusoidal distribution over the range of 177-18O° from the beam direction is shown.

Citation Download Citation

S. S. Borisov and S. I. Zaitsev "One particularity of energy-angular secondary electrons spectrum", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780J (31 May 2006); https://doi.org/10.1117/12.693210

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