Paper
25 October 2006 A contact CMM probe based on parallel optical detecting
Yonghong Wang, Xiaofen Yu
Author Affiliations +
Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800R (2006) https://doi.org/10.1117/12.716183
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China
Abstract
Based on parallel optical detecting principle, a contact CMM probe is proposed. A 2D light source array produced by the micro-optic component is used to form parallel micro-astigmatism system. When the probe comes into contact with workpiece, the reflecting point of each astigmatism path was deflected. The deflect information can be got through the change of the light intensity and the probe position can be obtained finally. It combines the advantages of optical non-contact method and mechanical contact one. The probe could provide trigger signal and zero cross detection, it also could obtain XYZ micrometer signal. Compared with the traditional electric trigger probe, the probe is simple in the mechanism with high precision, and it is easy to realize the micromation and integration. The construction and working principle of the contact CMM probe are investigated. Furthermore, experiment result is obtained, which accords with theory analysis. It indicates that parallel optical detecting method is applicable in contact CMM probe.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yonghong Wang and Xiaofen Yu "A contact CMM probe based on parallel optical detecting", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800R (25 October 2006); https://doi.org/10.1117/12.716183
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KEYWORDS
Sensors

Light sources

Mirrors

Signal detection

Confocal microscopy

Light

Mirror pointing

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