Paper
13 October 2006 A method for the calibration of step gauges
Hao Yan, Wuyi Wang
Author Affiliations +
Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800S (2006) https://doi.org/10.1117/12.716185
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China
Abstract
To calibrate step gauges, a new linear measuring system was improved in our laboratory that combines the Leitz universal measuring machine of the 1960s with a laser interferometer. This paper introduces the measurement method and the calculation of the expanded uncertainty of the measurement. The expanded uncertainty of the system is (0.3 + L) μm at k=2, where L is given in meter.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hao Yan and Wuyi Wang "A method for the calibration of step gauges", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800S (13 October 2006); https://doi.org/10.1117/12.716185
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KEYWORDS
Calibration

Interferometers

Measurement devices

Sensors

Laser systems engineering

Environmental sensing

Motion measurement

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