Sedimentations on high-precision surfaces of advanced materials by magnetorheological finishing

Andreas Geiss; Markus Schinhaerl; Elmar Pitschke; Rolf Rascher; Peter Sperber; Juraj Slabeycius

doi:10.1117/12.680247

15 September 2006 Sedimentations on high-precision surfaces of advanced materials by magnetorheological finishing

Andreas Geiss, Markus Schinhaerl, Elmar Pitschke, Rolf Rascher, Peter Sperber, Juraj Slabeycius

Proceedings Volume 6288, Current Developments in Lens Design and Optical Engineering VII; 62880R (2006) https://doi.org/10.1117/12.680247
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Magnetorheological finishing (MRF) is a computer controlled polishing (CCP) technique for high precision surfaces. The process uses a magnetorheological fluid which stiffens in a magnetic field and thus acts as the polishing tool. A standard MR fluid consists of magnetic carbonyl iron (CI) particles, nonmagnetic polishing abrasives and liquid. To delaying oxidation of the iron particles and avoiding agglomeration the liquid consists of water completed with stabilizers. For the material removal and smoothing of the surface mostly cerium oxide or diamond is used. The materials to be polished may tend toward to different sedimentations of the MR fluid on the machined surface. These sedimentations result from the machining and may develop a polishing layer with MR fluid components. At the University of Applied Sciences Deggendorf analysis of the machined surface are made by the scanning electronic microscope (SEM) to determine the sedimentations of the finishing. The results of the research display the influence for the surface properties due to developing polishing layer by magnetorheological finishing.

Citation Download Citation

Andreas Geiss, Markus Schinhaerl, Elmar Pitschke, Rolf Rascher, Peter Sperber, and Juraj Slabeycius "Sedimentations on high-precision surfaces of advanced materials by magnetorheological finishing", Proc. SPIE 6288, Current Developments in Lens Design and Optical Engineering VII, 62880R (15 September 2006); https://doi.org/10.1117/12.680247

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KEYWORDS

Particles

Polishing

Silicon

Surface finishing

Iron

Silicon carbide

Magnetorheological finishing

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