Paper
8 September 2006 Laser fabrication of microfluidics circuits
Vincent Tréanton, Lütfü Çelebi-Özcan, Raman Kashyap, Ludvik Martinu
Author Affiliations +
Proceedings Volume 6343, Photonics North 2006; 634325 (2006) https://doi.org/10.1117/12.707940
Event: Photonics North 2006, 2006, Quebec City, Canada
Abstract
This paper presents recent research undertaken in our laboratory in the field of direct laser writing of microfluidics circuits. Our novel technology allows the rapid fabrication of complex fluidic circuits. The fabricated channel have smooth walls and surfaces enabling the encapsulation of the circuits.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincent Tréanton, Lütfü Çelebi-Özcan, Raman Kashyap, and Ludvik Martinu "Laser fabrication of microfluidics circuits", Proc. SPIE 6343, Photonics North 2006, 634325 (8 September 2006); https://doi.org/10.1117/12.707940
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Microfluidics

Silica

Gas lasers

Carbon monoxide

Laser ablation

Silicon

Silicon films

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