Incoming database verification and management for mask data preparation

Frank F. Chen; Casper W. Lee; Jason C. Lin

doi:10.1117/12.685916

20 October 2006 Incoming database verification and management for mask data preparation

Frank F. Chen, Casper W. Lee, Jason C. Lin

Proceedings Volume 6349, Photomask Technology 2006; 63493U (2006) https://doi.org/10.1117/12.685916
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

We have developed a database verification and management system to ensure incoming database accuracy before mask data prep (MDP) and optimize computing resource. The system includes incoming database pre-check (IDPCS), backup/restore management functions and CPU resource management, which is queue manager system (QM). To ensure database accuracy through pre-check function can reduce data confirmation time and prevent data prep re-work if using un-excepting database. CPU resource management function has the possibility to optimize computing resource. Backup/Restore function presents automatic archive concept for data management.

Citation Download Citation

Frank F. Chen, Casper W. Lee, and Jason C. Lin "Incoming database verification and management for mask data preparation", Proc. SPIE 6349, Photomask Technology 2006, 63493U (20 October 2006); https://doi.org/10.1117/12.685916

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