Surface Characterization Of Grazing-Incidence Optics In The Extreme Ultraviolet And X-Ray Regions

Jean M. Bennett

doi:10.1117/12.964356

21 October 1986 Surface Characterization Of Grazing-Incidence Optics In The Extreme Ultraviolet And X-Ray Regions

Jean M. Bennett

Proceedings Volume 0640, Grazing Incidence Optics; (1986) https://doi.org/10.1117/12.964356
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

Roughness and waviness on mirrors for use in grazing-incidence optical systems intended for the extreme ultraviolet and x-ray regions affect both the focusing properties of the mirrors and the scattered light they produce. The most important surface spatial wave-lengths of the roughness are in the 1- to 100-μm range and are easily measurable using conventional optical and mechanical techniques. Descriptions of some of these techniques will be given along with examples of measurements made on very smooth polished optical surfaces that are comparable to those used as grazing-incidence optics.

Citation Download Citation

Jean M. Bennett "Surface Characterization Of Grazing-Incidence Optics In The Extreme Ultraviolet And X-Ray Regions", Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); https://doi.org/10.1117/12.964356

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