Concepts for micropneumatic and microhydraulic logic gates

Albert K. Henning

doi:10.1117/12.697807

22 January 2007 Concepts for micropneumatic and microhydraulic logic gates

Albert K. Henning

Proceedings Volume 6465, Microfluidics, BioMEMS, and Medical Microsystems V; 64650T (2007) https://doi.org/10.1117/12.697807
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Previously, we proposed novel microvalve structures, amenable to bulk micromachining, which effected fully complementary behavior in the switching of pneumatic (compressible gas) signals from a high pressure state to a low state, and vice versa. Using our quantitative relations for the flow of compressible gases in microvalves, we described mathematically the steady-state behavior of these micro-pneumatic logic gates, and derived the transfer characteristic for switching between pneumatic states. In this work, we extend the steady-state description to encompass a mathematical treatment of the transient response of micro-pneumatic logic gates. By analogy to MOSFET scaling in integrated circuits, we also apply the full transient model to scaled versions of a micro-pneumatic ring oscillator, in order to illustrate the performance which these devices may afford. As with MOSFETs (which rely on the compressibility of the electron gas), the ultimate speed of these devices is limited by the velocity of sound of the compressible gas. Finally, we present structures which can be used to realize micro-hydraulic logic. In micro-hydraulic logic, because the working fluid is now incompressible, the physical structure must have an alternate means to achieve capacitance, or storage of mass. Such a means is embodied in a variable-volume component attached to each node in the logic circuit.

Citation Download Citation

Albert K. Henning "Concepts for micropneumatic and microhydraulic logic gates", Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems V, 64650T (22 January 2007); https://doi.org/10.1117/12.697807

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available