Paper
9 February 2007 Hybrid photonic crystal microcavity switches on SOI
Author Affiliations +
Abstract
We report the development and characterization of 2-D photonic crystal (PC) microcavity devices on silicon on insulator. The transmission of light through a 2-D PC microcavity near resonance can be switched on and off by modulating the refractive index of the PC. Because silicon has poor electro-optical properties, it is advantageous to insert electro-optic materials inside the air holes. In this work, we report the design, fabrication, and characterization of such hybrid PC microcavity switches using liquid crystals as the electro-optic material. In addition, we demonstrate an electrode geometry that eliminates electric field screening by the more conducting silicon host, and thus enables switching. fabrication.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sean P. Anderson, Mikhail Haurylau, Jidong Zhang, and Philippe M. Fauchet "Hybrid photonic crystal microcavity switches on SOI", Proc. SPIE 6477, Silicon Photonics II, 647712 (9 February 2007); https://doi.org/10.1117/12.707905
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CITATIONS
Cited by 9 scholarly publications.
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KEYWORDS
Optical microcavities

Photonic crystals

Silicon

Electro optics

Liquid crystals

Oxides

Plasma etching

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