Computer and experimental modeling of light scattering at random and fractal surfaces

Oleg V. Angelsky; Alexander P. Maksimyak; Peter P. Maksimyak

doi:10.1117/12.725982

18 June 2007 Computer and experimental modeling of light scattering at random and fractal surfaces

Oleg V. Angelsky, Alexander P. Maksimyak, Peter P. Maksimyak

Proceedings Volume 6617, Modeling Aspects in Optical Metrology; 66170H (2007) https://doi.org/10.1117/12.725982
Event: Optical Metrology, 2007, Munich, Germany

Abstract

New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimation of these parameters is proposed.

Citation Download Citation

Oleg V. Angelsky, Alexander P. Maksimyak, and Peter P. Maksimyak "Computer and experimental modeling of light scattering at random and fractal surfaces", Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 66170H (18 June 2007); https://doi.org/10.1117/12.725982

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