Paper
5 September 2007 SiN photonic crystal cavities: promising tools for the manipulation of light in the visible
Michael Barth, Josef Kouba, Johannes Stingl, Bernd Loechel, Oliver Benson
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Abstract
SiN is a promising candidate for the fabrication of photonic crystals (PCs) with band gaps in the wavelength range between 550 nm and 850 nm. Here, we investigate the optical properties of cavities in SiN PC membranes by fluorescence spectroscopy of embedded emitters. For this purpose a dye solution is spin-cast on top of the PC membranes and the fluorescence is studied using a confocal microscopy setup. We observe strong emission resonances of molecules spatially and spectrally coupled to the cavity modes. These resonances are compared to finite-difference time-domain simulations of the PC structures, allowing an optimization of the cavity geometry to achieve high quality factors (several hundreds to nearly one thousand). Furthermore, we study routes to selectively incorporate single emitting particles into the cavities applying scanning probes. In this way we introduce SiN PC cavities as universal tools for the manipulation of the emission properties of a huge variety of different emitters in the visible.
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Michael Barth, Josef Kouba, Johannes Stingl, Bernd Loechel, and Oliver Benson "SiN photonic crystal cavities: promising tools for the manipulation of light in the visible", Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 664503 (5 September 2007); https://doi.org/10.1117/12.732371
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KEYWORDS
Particles

Photonic crystals

Molecules

Visible radiation

Luminescence

Scanning electron microscopy

Reactive ion etching

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