In-process non-destructive subsurface damage measurements and correlations to both laser damage and surface roughness

K. Cyrus Robinson; Abe Ghanbhari; Ted Kamprath; Jayson Nelson

doi:10.1117/12.734427

21 September 2007 In-process non-destructive subsurface damage measurements and correlations to both laser damage and surface roughness

K. Cyrus Robinson, Abe Ghanbhari, Ted Kamprath, Jayson Nelson

Author Affiliations +

Proceedings Volume 6671, Optical Manufacturing and Testing VII; 66710I (2007) https://doi.org/10.1117/12.734427
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Fabrication of fused silica optics for high-powered Nd:YAG laser applications commonly employs grinding and polishing processes to generate smooth, specular surfaces. The industry often describes such surfaces as "laser quality" after assessment against such gauges as surface roughness or scratch-dig standards; however, surfaces deemed acceptable have performed variably when actually exposed to high-powered laser illumination. Traditional processes to prepare such surfaces have often relied on rules of thumb, but we have found a convenient and simple method to help the fabricator optimize expressly for a desired performance metric, that of low subsurface damage. Subsurface damage often has immediate impact on susceptibility to destruction by high-power laser illumination, and we find that this damage is not universally related to surface roughness. In addition, we show that surface roughness measurements may vary depending on the measurement method used, such as white light interferometry (WLI), variable angle spectroscopic ellipsometry (VASE) or atomic force microscopy (AFM).

Citation Download Citation

K. Cyrus Robinson, Abe Ghanbhari, Ted Kamprath, and Jayson Nelson "In-process non-destructive subsurface damage measurements and correlations to both laser damage and surface roughness", Proc. SPIE 6671, Optical Manufacturing and Testing VII, 66710I (21 September 2007); https://doi.org/10.1117/12.734427

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