Optical beam steering using a 2D MEMS scanner

Yves Pétremand; Pierre-André Clerc; Marc Epitaux; Ralf Hauffe; Wilfried Noell; N. F. de Rooij

doi:10.1117/12.754170

10 October 2007 Optical beam steering using a 2D MEMS scanner

Yves Pétremand, Pierre-André Clerc, Marc Epitaux, Ralf Hauffe, Wilfried Noell, N. F. de Rooij

Proceedings Volume 6715, Optomechatronic Actuators and Manipulation III; 671502 (2007) https://doi.org/10.1117/12.754170
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light comping from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frewquency measurements agree with the simulated ones.

Citation Download Citation

Yves Pétremand, Pierre-André Clerc, Marc Epitaux, Ralf Hauffe, Wilfried Noell, and N. F. de Rooij "Optical beam steering using a 2D MEMS scanner", Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 671502 (10 October 2007); https://doi.org/10.1117/12.754170

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