A Description Of Scattering Of Light From A Rough Surface And Measurements Of The Surface Topography Of A Metal

O Keller; P Sonderkaer

doi:10.1117/12.939605

23 March 1987 A Description Of Scattering Of Light From A Rough Surface And Measurements Of The Surface Topography Of A Metal

O Keller, P Sonderkaer

Author Affiliations +

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939605
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

The scattering of light from a rough surface of a semi-infinite medium is analyzed by means of a Green's function formalism based on the macroscopic Maxwell equations. It is shown that every direction of scattering in the half-space above the surface, in the small roughness limit, is connected to precisely one spatial Fourier-component of the topography function. The possibilities for reconstructing the topography by ellipsometric measurements of the vectorial amplitude of the electric field scattered diffusely outside the specular direction are investigated. Using laser light having wavelengths of 458 nm or 514 nm, scattering measurements are performed on a polycrystalline AQ surface. Results are presented for experimental setups with two different angular resolutions.

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O Keller and P Sonderkaer "A Description Of Scattering Of Light From A Rough Surface And Measurements Of The Surface Topography Of A Metal", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939605

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