A micro-electromechanical system design and manufacture considering fabrication error

Hua Li; Gengchen Shi

doi:10.1117/12.756124

4 January 2008 A micro-electromechanical system design and manufacture considering fabrication error

Hua Li, Gengchen Shi

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360G (2008) https://doi.org/10.1117/12.756124
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

MEMS fabrication technology has very high fabrication precision, but there is still fabrication error inevitably like any other fabrication technology. We adopt LIGA technology to fabricate a Micro Electro-Mechanical System. From the analysis of fabrication process, the fabrication errors of MEMS part consist of mask and LIGA fabrication error. The designed MEMS parts can be divided into metal and PMMA part. Synthesizing the mask and LIGA fabrication errors, the errors of metal entity and cavity structure are -10.5μm~+5.5μm and -5.5μm~+10.5μm. The errors of PMMA entity and cavity structure are -5μm~+10μm and -10μm~+5μm. Analyzing each situation, the most interference dimension of the four assembling situations is 20μm. According to the conclusion, we leave 10μm margin for each of the two parts assembling together. So the whole margin of the two parts is 20μm, which ensures that the two MEMS parts can be assembled reliably. Measuring the fabricated MEMS part with a micro precision measurement equipment indicated that the fabrication error was in the scope of theoretical analysis. The fabricated LIGA MEMS system can be assembled reliably and the centrifugal experiment indicated that the motional part worked well and moved to the destination position.

Citation Download Citation

Hua Li and Gengchen Shi "A micro-electromechanical system design and manufacture considering fabrication error", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360G (4 January 2008); https://doi.org/10.1117/12.756124

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available