Characterizations of microcantilever chemical sensors based on SOI material

Fangrong Hu; Dajia Wang; Chuankai Qiu; Aina Wang; Hongtao Gao; Jun Yao

doi:10.1117/12.758232

4 January 2008 Characterizations of microcantilever chemical sensors based on SOI material

Fangrong Hu, Dajia Wang, Chuankai Qiu, Aina Wang, Hongtao Gao, Jun Yao

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360S (2008) https://doi.org/10.1117/12.758232
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.

Citation Download Citation

Fangrong Hu, Dajia Wang, Chuankai Qiu, Aina Wang, Hongtao Gao, and Jun Yao "Characterizations of microcantilever chemical sensors based on SOI material", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360S (4 January 2008); https://doi.org/10.1117/12.758232

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