Research of the digital coding mask based on digital micromirror device

Bai Lu; YiQing Gao; NingNing Luo; LanLan Wei

doi:10.1117/12.755843

4 January 2008 Research of the digital coding mask based on digital micromirror device

Bai Lu, YiQing Gao, NingNing Luo, LanLan Wei

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360V (2008) https://doi.org/10.1117/12.755843
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

An approach, which is used to fabricate diffractive optical elements (MOEs), is presented by applying reduction projecting system based on digital micro-mirror device (DMD). In this paper, coding-mask is combined with DMD which is real-time, flexible and easy for alignment. Pre-distortion according to the non-linear effect in the aerial image and resist course can be implemented. The accumulation of exposure energy can be obtained through modulating rotating velocity of mask graphics, and finally distribution of exposure, which is required, can be achieved. It shows that the method is practical and feasible on the grounds of the results of MATLAB simulation and experiments.

Citation Download Citation

Bai Lu, YiQing Gao, NingNing Luo, and LanLan Wei "Research of the digital coding mask based on digital micromirror device", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360V (4 January 2008); https://doi.org/10.1117/12.755843

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