Novel 3D micromirror for miniature optical bio-probe SiOB assembly

Janak Singh; Yingshun Xu; C. S. Premachandran; Teo Hui Siang Jason; Nanguang Chen

doi:10.1117/12.762544

28 February 2008 Novel 3D micromirror for miniature optical bio-robe SiOB assembly

Janak Singh, Yingshun Xu, C. S. Premachandran, Teo Hui Siang Jason, Nanguang Chen

Proceedings Volume 6886, Microfluidics, BioMEMS, and Medical Microsystems VI; 688608 (2008) https://doi.org/10.1117/12.762544
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

This article presents design and development of a novel 3D micromirror for large deflection scanning application in invivo optical coherence tomography (OCT) bio-imaging probe. Overall mirror chip size is critical to reduce the diameter of the probe; however, mirror plate itself should not be less than 500 μm as smaller size means reducing the amount of light collected after scattering for OCT imaging. In this study, mirror chip sizes of 1 × 1 mm² and 1.5 × 1.5 mm² were developed with respectively 400 and 500 micrometer diameter mirror plates. The design includes electro thermal excitation mechanism in the same plane as mirror plate to achieve 3D free space scanning. Larger deflection requires longer actuators, which usually increase the overall size of the chip. To accommodate longer actuators and keep overall chip size same curved beam actuators are designed and integrated for micromirror scanning. Typical length of the actuators was 800 micrometer, which provided up to 17 degrees deflection. Deep reactive ion etching (DRIE) process module was used extensively to etch high aspect ratio structures and keep the total mirror chip size small.

Citation Download Citation

Janak Singh, Yingshun Xu, C. S. Premachandran, Teo Hui Siang Jason, and Nanguang Chen "Novel 3D micromirror for miniature optical bio-robe SiOB assembly", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688608 (28 February 2008); https://doi.org/10.1117/12.762544

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