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Due to the proper optical property and flexibility in the process development, an epoxy-based, high-aspect ratio
photoresist SU-8 is now attracting attention in optical sensing applications. Manipulation of the surface properties of SU-8 waveguides is critical to attach functional films such as chemically-sensitive layers. We describe a new integration
process to immobilize fluorescence molecules on SU-8 waveguide surface for application to intensity-based optical
chemical sensors. We use two polymers for this application. Spin-on, hydrophobic, photopatternable silicone is a
convenient material to contain fluorophore molecules and to pattern a photolithographically defined thin layer on the
surface of SU-8. We use fumed silica powders as an additive to uniformly disperse the fluorophores in the silicone
precursor. In general, additional processes are not critically required to promote the adhesion between the SU-8 and
silicone. The other material is polyethylene glycol diacrylate (PEGDA). Recently we demonstrated a novel photografting
method to modify the surface of SU-8 using a surface bound initiator to control its wettability. The activated surface is
then coated with a monomer precursor solution. Polymerization follows when the sample is exposed to UV irradiation,
resulting in a grafted PEGDA layer incorporating fluorophores within the hydrogel matrix. Since this method is based
the UV-based photografting reaction, it is possible to grow off photolithographically defined hydrogel patterns on the
waveguide structures. The resulting films will be viable integrated components in optical bioanalytical sensors. This is a
promising technique for integrated chemical sensors both for planar type waveguide and vertical type waveguide
chemical sensors.
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