Optical field probing in photonic structures by atomic force microscopy combined with optical heterodyne detection

Sylvain Blaize; Gilles Lérondel; Aurélien Bruyant; Renaud Bachelot; Pascal Royer

doi:10.1117/12.763854

7 March 2008 Optical field probing in photonic structures by atomic force microscopy combined with optical heterodyne detection

Sylvain Blaize, Gilles Lérondel, Aurélien Bruyant, Renaud Bachelot, Pascal Royer

Author Affiliations +

Proceedings Volume 6896, Integrated Optics: Devices, Materials, and Technologies XII; 689616 (2008) https://doi.org/10.1117/12.763854
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

This article presents recent advances in scattering-type near field optical scanning microscopy used as a powerful characterization tool for integrated optics. By significant examples, it is shown that this specific probe microscopy based on an Atomic Force Microscope setup with optical heterodyne detection functionalities allows for in situ quantitative study of the complex field propagating in compact silicon on insulator photonic structures (single channel waveguides, MMI splitters and microdisk resonators).

Citation Download Citation

Sylvain Blaize, Gilles Lérondel, Aurélien Bruyant, Renaud Bachelot, and Pascal Royer "Optical field probing in photonic structures by atomic force microscopy combined with optical heterodyne detection", Proc. SPIE 6896, Integrated Optics: Devices, Materials, and Technologies XII, 689616 (7 March 2008); https://doi.org/10.1117/12.763854

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